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Details: |
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Provides the Tectra Plasma Source, a multi-purpose source producing either atoms or ions and finds uses in a range of HV and UHV applications.
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| URL: |
http://www.plasma-source.de/
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| Title: |
Plasma Source as atom source, ion source and atom/ion hybrid source (microwave plasma source) |
| Image: |
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| Description: |
tectra's new Gen2 Plasma Source which can be user configured as Atom Source, Ion Source or Atom/Ion Hybrid Source. As filamentless ECR microwave plasma source it can be used with reactive gases, not possible with Kaufman ion sources. |
| Specialized in: |
Cleaning
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Mbe
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Molecular Beam Epitaxy
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Uhv
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Oxford
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Rf
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Nitrogen
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Hydrogen
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Oxygen
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Plasma
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