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Details: |
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Efficient and reliable exhaust (effluent) gas scrubber for water soluble gas applications in the semiconductor processing industry
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| URL: |
http://airgard.net
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| Title: |
Airgard - Point of use wet scrubbers for semiconductor process gas effluent abatement |
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| Description: |
Airgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automated gas inlet plunger and custom scrubber inlets are tailored to individual processes to provide maximum uptime and process stability. |
| Specialized in: |
Wet Scrubbers
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Scrubbers
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Fume Scrubbers
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Abatement
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Epi
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Fume Scrubbers
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Toxic Gases
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Vector
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Epitaxy
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Environmental
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Gas
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Inlet
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Popular Sites |
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